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企電子高機能材料業願景
企電子高機能材料業願景
SHINKO伸興
UVU Ultrasonic Dry Cleaner
The non-contact ultrasonic cleaner with the highest performance in this series
-Removes 100% of particles down to 1 μm
-A non-contact system that does not affect the substrate surface
-No deterioration of ultrasonic performance

VUV Ultrasonic Dry Cleaner
High performance and cost-effective non-contact ultrasonic dust removal equipment:
-Can 100% remove particles larger than 3.0μm
-Being a non-contact solution, it does not affect the substrate surface
-The ultrasonic performance does not degrade over time
